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 Freescale Semiconductor Technical Data
Document Number: MRF6S18140H Rev. 1.1, 12/2009
RF Power Field Effect Transistors
N-Channel Enhancement-Mode Lateral MOSFETs
Designed for N-CDMA base station applications with frequencies from 1805 to 1880 MHz. Suitable for TDMA, CDMA and multicarrier amplifier applica tions. To be used in Class AB for PCN- PCS/cellular radio and WLL applica tions. * Typical 2-Carrier N-CDMA Performance: VDD = 28 Volts, IDQ = 1200 mA, Pout = 29 Watts Avg., f = 1877.5 MHz, IS-95 CDMA (Pilot, Sync, Paging, Traffic Codes 8 Through 13) Channel Bandwidth = 1.2288 MHz. PAR = 9.8 dB @ 0.01% Probability on CCDF. Power Gain -- 16 dB Drain Efficiency -- 27.5% IM3 @ 2.5 MHz Offset -- -36 dBc in 1.2288 MHz Bandwidth ACPR @ 885 kHz Offset -- -50.5 dBc in 30 kHz Bandwidth * Capable of Handling 10:1 VSWR, @ 28 Vdc, 1840 MHz, 140 Watts CW Output Power Features * Characterized with Series Equivalent Large-Signal Impedance Parameters * Internally Matched for Ease of Use * Qualified Up to a Maximum of 32 VDD Operation * Integrated ESD Protection * Designed for Lower Memory Effects and Wide Instantaneous Bandwidth Applications * RoHS Compliant * In Tape and Reel. R3 Suffix = 250 Units per 56 mm, 13 inch Reel.
MRF6S18140HR3 MRF6S18140HSR3
ARCHIVE INFORMATION
CASE 465B-03, STYLE 1 NI-880 MRF6S18140HR3
CASE 465C-02, STYLE 1 NI-880S MRF6S18140HSR3
Table 1. Maximum Ratings
Rating Drain-Source Voltage Gate-Source Voltage Storage Temperature Range Case Operating Temperature Operating Junction Temperature (1,2) Symbol VDSS VGS Tstg TC TJ Value -0.5, +68 -0.5, +12 -65 to +150 150 225 Unit Vdc Vdc C C C
Table 2. Thermal Characteristics
Characteristic Thermal Resistance, Junction to Case Case Temperature 80C, 140 W CW Case Temperature 73C, 29 W CW Symbol RJC 0.31 0.35 Value (2,3) Unit C/W
1. Continuous use at maximum temperature will affect MTTF. 2. MTTF calculator available at http://www.freescale.com/rf. Select Software & Tools/Development Tools/Calculators to access MTTF calculators by product. 3. Refer to AN1955, Thermal Measurement Methodology of RF Power Amplifiers. Go to http://www.freescale.com/rf. Select Documentation/Application Notes - AN1955.
(c) Freescale Semiconductor, Inc., 2006, 2008-2009. All rights reserved.
MRF6S18140HR3 MRF6S18140HSR3 1
RF Device Data Freescale Semiconductor
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1805-1880 MHz, 29 W AVG., 28 V 2 x N-CDMA LATERAL N-CHANNEL RF POWER MOSFETs
Table 3. ESD Protection Characteristics
Test Methodology Human Body Model (per JESD22-A114) Machine Model (per EIA/JESD22-A115) Charge Device Model (per JESD22-C101) Class 2 (Minimum) A (Minimum) IV (Minimum)
Table 4. Electrical Characteristics (TA = 25C unless otherwise noted)
Characteristic Off Characteristics Zero Gate Voltage Drain Leakage Current (VDS = 68 Vdc, VGS = 0 Vdc) Zero Gate Voltage Drain Leakage Current (VDS = 28 Vdc, VGS = 0 Vdc) IDSS IDSS IGSS -- -- -- -- -- -- 10 1 1 Adc Adc Adc Symbol Min Typ Max Unit
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On Characteristics Gate Threshold Voltage (VDS = 10 Vdc, ID = 300 Adc) Gate Quiescent Voltage (VDD = 28 Vdc, ID = 1200 mAdc, Measured in Functional Test) Drain-Source On-Voltage (VGS = 10 Vdc, ID = 3 Adc) Dynamic Characteristics (1) Reverse Transfer Capacitance (VDS = 28 Vdc 30 mV(rms)ac @ 1 MHz, VGS = 0 Vdc) Output Capacitance (VDS = 28 Vdc 30 mV(rms)ac @ 1 MHz, VGS = 0 Vdc) Crss Coss -- -- 2.2 685 -- -- pF pF VGS(th) VGS(Q) VDS(on) 1.2 2 0.1 2 2.7 0.22 2.7 3.8 0.3 Vdc Vdc Vdc
Functional Tests (In Freescale Test Fixture, 50 ohm system) VDD = 28 Vdc, IDQ = 1200 mA, Pout = 29 W Avg., f1 = 1877.5 MHz, f2 = 1880 MHz, 2-Carrier N-CDMA, 1.2288 MHz Channel Bandwidth Carriers. ACPR measured in 30 kHz Channel Bandwidth @ 885 kHz Offset. IM3 measured in 1.2288 MHz Channel Bandwidth @ 2.5 MHz Offset. PAR = 9.8 dB @ 0.01% Probability on CCDF. Power Gain Drain Efficiency Intermodulation Distortion Adjacent Channel Power Ratio Input Return Loss 1. Part internally matched both on input and output. Gps D IM3 ACPR IRL 15 25.5 -- -- -- 16 27.5 -36 -50.5 -10.5 18 -- -34.5 -48 -- dB % dBc dBc dB
MRF6S18140HR3 MRF6S18140HSR3 2 RF Device Data Freescale Semiconductor
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Gate-Source Leakage Current (VGS = 5 Vdc, VDS = 0 Vdc)
VSUPPLY + R3 VBIAS + C8 R5 C4 R1 C6 Z18 RF INPUT Z14 Z1 Z2 Z3 Z4 Z5 Z6 C1 Z15 R4 + B2 R2 C5 C7 C3 C11 C14 C15 Z7 Z8 Z9 Z10 Z11 Z12 Z13 Z17 DUT C2 Z16 Z19 Z20 Z21 Z22 RF OUTPUT Z23 B1 C10 C12 C13 C16
ARCHIVE INFORMATION
C9
Z1 Z2 Z3 Z4 Z5 Z6 Z7 Z8 Z9 Z10 Z11 Z12
0.166 x 0.082 Microstrip 0.250 x 0.334 Microstrip 0.140 x 0.340 Microstrip 0.092 x 0.164 Microstrip 0.130 x 0.234 Microstrip 0.109 x 0.082 Microstrip 0.070 x 0.082 Microstrip 0.350 x 0.644 Microstrip 0.092 x 0.420 Microstrip 0.720 x 0.082 Microstrip 0.090 x 0.485 x 0.580 Taper 0.342 x 1.070 Microstrip
Z13 Z14 Z15 Z16 Z17 Z18 Z19 Z20 Z21 Z22 Z23 PCB
0.108 x 1.070 Microstrip 0.960 x 0.046 Microstrip 0.084 x 0.046 Microstrip 0.996 x 0.080 Microstrip 1.015 x 0.080 Microstrip 0.099 x 1.070 Microstrip 0.516 x 1.070 Microstrip 0.292 x 0.288 Microstrip 0.198 x 0.114 Microstrip 0.372 x 0.080 Microstrip 1.181 x 0.080 Microstrip DS Electronics GX0300, 0.030, r = 2.55
Figure 1. MRF6S18140HR3(HSR3) Test Circuit Schematic
Table 5. MRF6S18140HR3(HSR3) Test Circuit Component Designations and Values
Part B1, B2 C1, C2 C3 C4, C5, C12, C13, C14, C15 C6, C7, C10, C11 C8, C9 C16 R1, R2 R3, R4 R5, R6 Description 47 , 100 MHz Small Ferrite Beads, Surface Mount 39 pF Chip Capacitors 0.1 pF Chip Capacitor 10 F, 50 V Chip Capacitors 9.1 pF Chip Capacitors 47 F, 50 V Electrolytic Capacitors 470 F, 63 V Electrolytic Capacitor 12 , 1/4 W Resistors 1.0 K, 1/4 W Resistors 560 K, 1/4 W Chip Resistors Part Number 2743019447 ATC700B390FT500XT ATC100B0R1BT500XT GRM55DR61H106KA88B ATC100B9R1BT500XT EMVY500ADA470MF80G EMVY630GTR471MMH0S CRCW120612R0FKEA CRCW12061001FKEA CRCW12065602FKEA Manufacturer Fair-Rite ATC ATC Murata ATC Nippon Chemi-Con Nippon Chemi-Con Vishay Vishay Vishay
MRF6S18140HR3 MRF6S18140HSR3 RF Device Data Freescale Semiconductor 3
ARCHIVE INFORMATION
R6
C10 R3 C8 + B1 R1 C6
C12 C13
C16 R5 C4 C1 C2 CUT OUT AREA
ARCHIVE INFORMATION
R6 C5 + C9 R4 B2 MRF6S18140H/HS Rev. 1 R2 C7
C3
C14 C15
C11
Figure 2. MRF6S18140HR3(HSR3) Test Circuit Component Layout
MRF6S18140HR3 MRF6S18140HSR3 4 RF Device Data Freescale Semiconductor
ARCHIVE INFORMATION
TYPICAL CHARACTERISTICS
D, DRAIN EFFICIENCY (%) 16.8 16.6 16.4 Gps, POWER GAIN (dB) 16.2 16 15.8 15.6 15.4 15.2 15 14.8 1760 ACPR 1780 1800 1820 1840 1860 1880 1900 IRL Gps VDD = 28 Vdc, Pout = 29 W (Avg.) IDQ = 1200 mA, 2-Carrier N-CDMA 2.5 MHz Carrier Spacing, 1.2288 MHz Channel Bandwidth, PAR = 9.8 dB @ 0.01% Probability (CCDF) IM3 D 30 29 28 27 26 IM3 (dBc), ACPR (dBc) -24 -30 -36 -42 -48 -54 1920 0 -4 -8 -12 -16 -20
ARCHIVE INFORMATION
IRL, INPUT RETURN LOSS (dB)
f, FREQUENCY (MHz)
Figure 3. 2-Carrier N-CDMA Broadband Performance @ Pout = 29 Watts Avg.
16.4 16.2 16 Gps, POWER GAIN (dB) 15.8 15.6 15.4 15.2 15 14.8 14.6 14.4 1760 IRL ACPR 1780 1800 1820 1840 1860 1880 1900 IM3 Gps VDD = 28 Vdc, Pout = 60 W (Avg.) IDQ = 1200 mA, 2-Carrier N-CDMA 2.5 MHz Carrier Spacing, 1.2288 MHz Channel Bandwidth, PAR = 9.8 dB @ 0.01% Probability (CCDF) D 42 41 40 39 38 IM3 (dBc), ACPR (dBc) -12 -18 -24 -30 -36 -42 1920 0 -4 -8 -12 -16 -20
f, FREQUENCY (MHz)
Figure 4. 2-Carrier N-CDMA Broadband Performance @ Pout = 60 Watts Avg.
19 18 Gps, POWER GAIN (dB) 17 16 900 mA 15 14 600 mA 13 1 10 100 400 Pout, OUTPUT POWER (WATTS) PEP VDD = 28 Vdc f1 = 1838.75 MHz, f2 = 1841.25 MHz Two-Tone Measurements, 2.5 MHz Tone Spacing IDQ = 1800 mA IMD, THIRD ORDER INTERMODULATION DISTORTION (dBc) -1 0 VDD = 28 Vdc f1 = 1838.75 MHz, f2 = 1841.25 MHz Two-Tone Measurements, 2.5 MHz Tone Spacing
-2 0
1500 mA 1200 mA
-3 0 IDQ = 600 mA -4 0 1800 mA
-5 0 900 mA -60 1 10 1200 mA
1500 mA
100
400
Pout, OUTPUT POWER (WATTS) PEP
Figure 5. Two-T one Power Gain versus Output Power
Figure 6. Third Order Intermodulation Distortion versus Output Power
MRF6S18140HR3 MRF6S18140HSR3 RF Device Data Freescale Semiconductor 5
ARCHIVE INFORMATION
D, DRAIN EFFICIENCY (%)
IRL, INPUT RETURN LOSS (dB)
TYPICAL CHARACTERISTICS
IMD, INTERMODULATION DISTORTION (dBc) -10 IMD, INTERMODULATION DISTORTION (dBc) -20 -30 3rd Order -40 -50 -60 -70 1 10 100 400 Pout, OUTPUT POWER (WATTS) PEP 7th Order 5th Order VDD = 28 Vdc, IDQ = 1200 mA f1 = 1838.75 MHz, f2 = 1841.25 MHz Two-Tone Measurements 0 -1 0 -2 0 -3 0 -4 0 -5 0 -6 0 TWO-T ONE SPACING (MHz) IM5-U IM5-L IM7-L IM7-U IM3-U IM3-L VDD = 28 Vdc, Pout = 140 W (PEP), IDQ = 1200 mA Two-Tone Measurements, (f1 + f2)/2 = Center Frequency of 1840 MHz
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Figure 7. Intermodulation Distortion Products versus Output Power
60 59 58 Pout, OUTPUT POWER (dBm) 57 56 55 P1dB = 52.6 dBm (182.64 W) 54 53 52 51 50 49 32 33 34 35 36 P3dB = 53.36 dBm (216.77 W) P6dB = 53.90 dBm (245.47 W)
Figure 8. Intermodulation Distortion Products versus Tone Spacing
Ideal
Actual VDD = 28 Vdc, IDQ = 1200 mA Pulsed CW, 12 sec(on), 1% Duty Cycle f = 1840 MHz 37 38 39 40 41 42 43 44
Pin, INPUT POWER (dBm)
Figure 9. Pulsed CW Output Power versus Input Power
D, DRAIN EFFICIENCY (%), Gps, POWER GAIN (dB) 50 45 40 35 30 25 20 15 10 5 0 1 10 Pout, OUTPUT POWER (WATTS) CW TC = -30_C D ACPR Gps 85_C 25_C VDD = 28 Vdc, IDQ = 1200 mA f1 = 1838.75 MHz, f2 = 1841.25 MHz 2-Carrier N-CDMA, 2.5 MHz Carrier Spacing, 1.2288 MHz Channel Bandwidth, PAR = 9.8 dB IM3 @ 0.01% Probability (CCDF) -30 _C 85_C -20 -25 -30 IM3 (dBc), ACPR (dBc) -35 -40 -45 -50 -55 -60 -65 -70 100
25_C
Figure 10. 2-Carrier N-CDMA ACPR, IM3, Power Gain and Drain Efficiency versus Output Power
MRF6S18140HR3 MRF6S18140HSR3 6 RF Device Data Freescale Semiconductor
ARCHIVE INFORMATION
1
10
100
TYPICAL CHARACTERISTICS
18 TC = -30_C 17 Gps, POWER GAIN (dB) 16 15 14 13 12 D VDD = 28 Vdc IDQ = 1200 mA f = 1840 MHz 10 100 Gps 25_C 85_C -30 _C 66 25_C 85_C 55 D, DRAIN EFFICIENCY (%) 44 33 22 11 0 400 Gps, POWER GAIN (dB) 16 17 IDQ = 1200 mA f = 1840 MHz
15
14 VDD = 24 V 13 Pout, OUTPUT POWER (WATTS) CW 0 100 28 V 200 32 V 260
ARCHIVE INFORMATION
Pout, OUTPUT POWER (WATTS) CW
Figure 11. Power Gain and Drain Efficiency versus CW Output Power
108
Figure 12. Power Gain versus Output Power
MTTF (HOURS)
107
106
105 90 110 130 150 170 190 210 230 250 TJ, JUNCTION TEMPERATURE (C) This above graph displays calculated MTTF in hours when the device is operated at VDD = 28 Vdc, Pout = 29 W Avg., and D = 27.5%. MTTF calculator available at http://www.freescale.com/rf. Select Software & Tools/Development Tools/Calculators to access MTTF calculators by product.
Figure 13. MTTF Factor versus Junction Temperature
MRF6S18140HR3 MRF6S18140HSR3 RF Device Data Freescale Semiconductor 7
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1
N-CDMA TEST SIGNAL
100 10 PROBABILITY (%) 1 0.1 0.01 0.001 0.0001 IS-95 CDMA (Pilot, Sync, Paging, Traffic Codes 8 Through 13) 1.2288 MHz Channel Bandwidth Carriers. ACPR Measured in 30 kHz Bandwidth @ 885 kHz Offset. IM3 Measured in 1.2288 MHz Bandwidth @ 2.5 MHz Offset. PAR = 9.8 dB @ 0.01% Probability on CCDF. 0 2 4 6 8 10 (dB) 0 -1 0 -2 0 -3 0 -4 0 -5 0 -6 0 -7 0 -8 0 -ACPR in 30 kHz Integrated BW +ACPR in 30 kHz Integrated BW -IM3 in 1.2288 MHz Integrated BW +IM3 in 1.2288 MHz Integrated BW 1.2288 MHz Channel BW
ARCHIVE INFORMATION
PEAK-T O-A VERAGE (dB)
Figure 14. 2-Carrier CCDF N-CDMA
-100 -7.5
-6
-4.5
-3
-1.5
0
1.5
3
4.5
6
7.5
f, FREQUENCY (MHz)
Figure 15. 2-Carrier N-CDMA Spectrum
MRF6S18140HR3 MRF6S18140HSR3 8 RF Device Data Freescale Semiconductor
ARCHIVE INFORMATION
-9 0
f = 1920 MHz Zo = 10
Zload
ARCHIVE INFORMATION
f = 1760 MHz
f = 1920 MHz Zsource f = 1760 MHz
VDD = 28 Vdc, IDQ = 1200 mA, Pout = 29 W Avg. f MHz 1760 1780 1800 1820 1840 1860 1880 1900 1920 Zsource W 1.454 - j6.703 1.465 - j6.511 1.467 - j6.336 1.448 - j6.193 1.440 - j6.049 1.414 - j5.938 1.377 - j5.827 1.311 - j5.710 1.231 - j5.583 Zload W 1.344 - j2.479 1.338 - j2.299 1.333 - j2.129 1.325 - j1.966 1.308 - j1.801 1.301 - j1.687 1.303 - j1.550 1.301 - j1.419 1.289 - j1.303
Zsource = Test circuit impedance as measured from gate to ground. Zload = Test circuit impedance as measured from drain to ground.
Input Matching Network
Device Under Test
Output Matching Network
Z
source
Z
load
Figure 16. Series Equivalent Source and Load Impedance MRF6S18140HR3 MRF6S18140HSR3 RF Device Data Freescale Semiconductor 9
ARCHIVE INFORMATION
PACKAGE DIMENSIONS
B G
1 2X NOTES: 1. DIMENSIONING AND TOLERANCING PER ANSI Y14.5M-1994. 2. CONTROLLING DIMENSION: INCH. 3. DIMENSION H IS MEASURED 0.030 (0.762) AWAY FROM PACKAGE BODY. 4. DELETED INCHES MIN MAX 1.335 1.345 0.535 0.545 0.147 0.200 0.495 0.505 0.035 0.045 0.003 0.006 1.100 BSC 0.057 0.067 0.170 0.210 0.872 0.888 0.871 0.889 .118 .138 0.515 0.525 0.515 0.525 0.007 REF 0.010 REF 0.015 REF MILLIMETERS MIN MAX 33.91 34.16 13.6 13.8 3.73 5.08 12.57 12.83 0.89 1.14 0.08 0.15 27.94 BSC 1.45 1.70 4.32 5.33 22.15 22.55 19.30 22.60 3.00 3.51 13.10 13.30 13.10 13.30 0.178 REF 0.254 REF 0.381 REF
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ARCHIVE INFORMATION
ccc H
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C F E A A
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SEATING PLANE
STYLE 1: PIN 1. DRAIN 2. GATE 3. SOURCE
CASE 465B-03 ISSUE D NI-880 MRF6S18140HR3
B
1
B
(FLANGE)
NOTES: 1. DIMENSIONING AND TOLERANCING PER ANSI Y14.5M-1994. 2. CONTROLLING DIMENSION: INCH. 3. DIMENSION H IS MEASURED 0.030 (0.762) AWAY FROM PACKAGE BODY. INCHES MIN MAX 0.905 0.915 0.535 0.545 0.147 0.200 0.495 0.505 0.035 0.045 0.003 0.006 0.057 0.067 0.170 0.210 0.872 0.888 0.871 0.889 0.515 0.525 0.515 0.525 0.007 REF 0.010 REF 0.015 REF MILLIMETERS MIN MAX 22.99 23.24 13.60 13.80 3.73 5.08 12.57 12.83 0.89 1.14 0.08 0.15 1.45 1.70 4.32 5.33 22.15 22.55 19.30 22.60 13.10 13.30 13.10 13.30 0.178 REF 0.254 REF 0.381 REF
K D TA
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CASE 465C-02 ISSUE D NI-880S MRF6S18140HSR3
MRF6S18140HR3 MRF6S18140HSR3 10 RF Device Data Freescale Semiconductor
ARCHIVE INFORMATION
DIM A B C D E F G H K M N Q R S aaa bbb ccc
PRODUCT DOCUMENTATION
Refer to the following documents to aid your design process. Application Notes * AN1955: Thermal Measurement Methodology of RF Power Amplifiers Engineering Bulletins * EB212: Using Data Sheet Impedances for RF LDMOS Devices
REVISION HISTORY
The following table summarizes revisions to this document.
Revision Date Sept. 2006 Dec. 2008 * Initial Release of Data Sheet * Modified data sheet to reflect RF Test Reduction described in Product and Process Change Notification number, PCN13232, p. 1, 2 * Removed Lower Thermal Resistance and Low Gold Plating bullets from Features section as functionality is standard, p. 1 * Corrected VDS to VDD in the RF test condition voltage callout for VGS(Q), and added "Measured in Functional Test", On Characteristics table, p. 2 * Updated Part Numbers in Table 5, Component Designations and Values, to latest RoHS compliant part numbers, p. 3 * Adjusted scale for Fig. 8, Intermodulation Distortion Products versus Tone Spacing, to show wider dynamic range, p. 6 * Replaced Fig. 13, MTTF versus Junction Temperature with updated graph. Removed Amps2 and listed operating characteristics and location of MTTF calculator for device, p. 7 1.1 Dec. 2009 * Corrected data sheet to reflect RF Test Reduction frequency described in Product and Process Change Notification number, PCN13232, p. 1, 2 * Data sheet archived. Part no longer manufactured. Description
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1
MRF6S18140HR3 MRF6S18140HSR3 RF Device Data Freescale Semiconductor 11
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0
How to Reach Us:
Home Page: www.freescale.com Web Support: http://www.freescale.com/support USA/Europe or Locations Not Listed: Freescale Semiconductor, Inc. Technical Information Center, EL516 2100 East Elliot Road Tempe, Arizona 85284 1-800-521-6274 or +1-480-768-2130 www.freescale.com/support Europe, Middle East, and Africa: Freescale Halbleiter Deutschland GmbH Technical Information Center Schatzbogen 7 81829 Muenchen, Germany +44 1296 380 456 (English) +46 8 52200080 (English) +49 89 92103 559 (German) +33 1 69 35 48 48 (French) www.freescale.com/support Japan: Freescale Semiconductor Japan Ltd. Headquarters ARCO Tower 15F 1-8-1, Shimo-Meguro, Meguro-ku, Tokyo 153-0064 Japan 0120 191014 or +81 3 5437 9125 support.japan@freescale.com Asia/Pacific: Freescale Semiconductor China Ltd. Exchange Building 23F No. 118 Jianguo Road Chaoyang District Beijing 100022 China +86 10 5879 8000 support.asia@freescale.com For Literature Requests Only: Freescale Semiconductor Literature Distribution Center 1-800-441-2447 or +1-303-675-2140 Fax: +1-303-675-2150 LDCForFreescaleSemiconductor@hibbertgroup.com
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Information in this document is provided solely to enable system and software implementers to use Freescale Semiconductor products. There are no express or implied copyright licenses granted hereunder to design or fabricate any integrated circuits or integrated circuits based on the information in this document. Freescale Semiconductor reserves the right to make changes without further notice to any products herein. Freescale Semiconductor makes no warranty, representation or guarantee regarding the suitability of its products for any particular purpose, nor does Freescale Semiconductor assume any liability arising out of the application or use of any product or circuit, and specifically disclaims any and all liability, including without limitation consequential or incidental damages. "Typical" parameters that may be provided in Freescale Semiconductor data sheets and/or specifications can and do vary in different applications and actual performance may vary over time. All operating parameters, including "Typicals", must be validated for each customer application by customer's technical experts. Freescale Semiconductor does not convey any license under its patent rights nor the rights of others. Freescale Semiconductor products are not designed, intended, or authorized for use as components in systems intended for surgical implant into the body, or other applications intended to support or sustain life, or for any other application in which the failure of the Freescale Semiconductor product could create a situation where personal injury or death may occur. Should Buyer purchase or use Freescale Semiconductor products for any such unintended or unauthorized application, Buyer shall indemnify and hold Freescale Semiconductor and its officers, employees, subsidiaries, affiliates, and distributors harmless against all claims, costs, damages, and expenses, and reasonable attorney fees arising out of, directly or indirectly, any claim of personal injury or death associated with such unintended or unauthorized use, even if such claim alleges that Freescale Semiconductor was negligent regarding the design or manufacture of the part. Freescalet and the Freescale logo are trademarks of Freescale Semiconductor, Inc. All other product or service names are the property of their respective owners. (c) Freescale Semiconductor, Inc. 2006, 2008-2009. All rights reserved.
MRF6S18140HR3 MRF6S18140HSR3
Document Number: MRF6S18140H Rev. 12 1.1, 12/2009
RF Device Data Freescale Semiconductor
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